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Yoda died of age,and, similar to obi wan, his soul left his body and he disappeared, finally becoming one with the force.

Also when he became one with the force he turned into a force ghost. something only Qui-Gon Jinn, Obi-Wan Kenobi, Anakin Skywalker/Darth Vader and Yoda can do.

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Q: How did yoda die?
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